TSMC skips High-NA EUV for 1.4nm play

TSMC plans to begin early 1.4nm chip production in Taiwan without using ASML’s High-NA EUV machines. Instead, the company will rely on advanced multi-patterning methods. Though this approach takes more time and money, TSMC believes it can meet its goals using existing EUV tools.

Construction of a 1.4nm plant in Taichung starts this year, with mass output expected in late 2028. Research for this process is based in Hsinchu, and hiring is underway. Three buildings received permits in August.

Initial investment may reach NT$1.5 trillion, or about $49 billion, part of which will fund 30 EUV systems in 2027. TSMC aims for up to 30 percent lower power use from its A14 process and expects to improve production over time.

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